JPH0449669B2 - - Google Patents

Info

Publication number
JPH0449669B2
JPH0449669B2 JP57084188A JP8418882A JPH0449669B2 JP H0449669 B2 JPH0449669 B2 JP H0449669B2 JP 57084188 A JP57084188 A JP 57084188A JP 8418882 A JP8418882 A JP 8418882A JP H0449669 B2 JPH0449669 B2 JP H0449669B2
Authority
JP
Japan
Prior art keywords
sample
backscattered
backscattered electron
plate
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57084188A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58200184A (ja
Inventor
Nobuyoshi Hashimoto
Masahiro Tomita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP57084188A priority Critical patent/JPS58200184A/ja
Publication of JPS58200184A publication Critical patent/JPS58200184A/ja
Publication of JPH0449669B2 publication Critical patent/JPH0449669B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measurement Of Radiation (AREA)
JP57084188A 1982-05-18 1982-05-18 透過型電子顕微鏡 Granted JPS58200184A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57084188A JPS58200184A (ja) 1982-05-18 1982-05-18 透過型電子顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57084188A JPS58200184A (ja) 1982-05-18 1982-05-18 透過型電子顕微鏡

Publications (2)

Publication Number Publication Date
JPS58200184A JPS58200184A (ja) 1983-11-21
JPH0449669B2 true JPH0449669B2 (en]) 1992-08-12

Family

ID=13823496

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57084188A Granted JPS58200184A (ja) 1982-05-18 1982-05-18 透過型電子顕微鏡

Country Status (1)

Country Link
JP (1) JPS58200184A (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107976458A (zh) * 2017-10-10 2018-05-01 中国科学院自动化研究所 低能量背散射电子探测器
US11443916B2 (en) * 2020-04-15 2022-09-13 Kla Corporation Thin pellicle material for protection of solid-state electron detectors

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5049819U (en]) * 1973-09-04 1975-05-15
JPS5614845Y2 (en]) * 1976-12-16 1981-04-08

Also Published As

Publication number Publication date
JPS58200184A (ja) 1983-11-21

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